Wafer Boat
Available in vertical & horizontal designs, our wafer boats cater to 8” & 12” wafers. Diverse materials—quartz for high-purity high-temp processes, SiC for thermal shock resistance, ceramics for wet etching—ensure optimal performance. Ideal for oxidation, diffusion, and CVD, with customizable slot pitches down to ±0.01mm. Trust our solutions to safeguard your wafers and drive scientific innovation.
- High-Purity Quartz：99.99% ultra-pure quartz, zero contamination in oxidation/diffusion, protects experiment integrity.
- Superior Silicon Carbide：High-strength SiC, 5x wear resistance, withstands extreme heat & heavy use.
- Advanced Ceramic Alloys：Specialized ceramics, excellent chemical resistance, stable in wet etching and various temps.
- Composite Material Blend：Combines quartz's thermal stability & ceramics' strength for top performance in semiconductors.
FAQs:
1. Can I customize wafer boats with special sizes or structures?
Customization is available. Provide wafer size, process parameters, and special functional requirements (e.g., built-in sensors)
2. Which processes are suitable for different wafer boat materials (such as quartz, silicon carbide, and ceramics)?
High-purity quartz is ideal for high-temperature clean processes like oxidation and diffusion; silicon carbide, with its excellent wear resistance, suits high-frequency thermal cycling; ceramic alloys perform best in highly corrosive environments such as wet etching.
3. How do I select the right wafer boat model for 12-inch wafers?
Ensure the slot pitch and loading capacity match the wafer size. Also, consider process temperature, corrosiveness, and choose the appropriate material and structure accordingly.
4. What is the maximum temperature resistance of wafer boats?
Quartz materials can withstand up to 1200°C, while silicon carbide can endure temperatures above 1600°C. Refer to the product specification for precise details.
5. Will wafer boats release impurities to contaminate wafers after long-term high-temperature use?
High-purity quartz (99.99%) and special ceramic materials have strong chemical stability, with minimal impurity release under normal usage.
6. Can I process different types of wafers in the same wafer boat?
Not recommended to avoid cross-contamination. If necessary, ensure the wafers have non-reactive surfaces and compatible process conditions.
7. How do I clean a wafer boat?
After high-temperature processes, soak it in a diluted hydrofluoric acid (HF) solution to remove residues. For wet processes, rinse with deionized water and dry thoroughly.
8. What is the lifespan of a wafer boat?
It depends on usage frequency, temperature, and corrosiveness. Generally, quartz boats last 50-100 high-temperature cycles, while silicon carbide boats last longer.
9. Can wafer boats be used in a vacuum environment?
Most wafer boats support vacuum processes, but verify the material’s stability under vacuum and high temperatures.
10. How can I prevent wafers from sliding or breaking in the wafer boat?
Choose products with precise slot pitch (±0.01mm) and anti-slip inner walls. Ensure wafers are fully seated during loading.
11. Are wafer boats compatible with automated robotic arms?
Most models are designed for robotic arm compatibility. When purchasing, confirm that the interface size and gripping points match.
12. What are the advantages of composite-material wafer boats compared to single-material ones?
They combine the properties of multiple materials, such as the thermal stability of quartz and the mechanical strength of ceramics, fitting complex process requirements.
13. How should I transport and store wafer boats?
Use anti-static, scratch-resistant packaging boxes. Store in a dry, dust-free environment, avoiding heavy pressure and collisions.
14. Do surface scratches on wafer boats affect their performance?
Minor scratches have little impact, but deep ones may trap contaminants. Regularly inspect and replace severely damaged boats.
15. Are wafer boats from different brands interchangeable?
Check the size, slot type, and interface standards. Products compliant with SEMI specifications have higher compatibility.
16. Are wafer boats from different brands interchangeable?
Check the size, slot type, and interface standards. Products compliant with SEMI specifications have higher compatibility.
17. How do I know when to replace a wafer boat?
Yes, preheat it to 50%-70% of the process temperature before high-temperature processes to prevent thermal shock caused by large temperature differences.
18. What does the warranty policy cover when purchasing a wafer boat?
The warranty period is usually 6-12 months, covering material defects and structural damages caused by non-human factors.